发明名称 LITHOGRAPHY APPARATUS COMPRISING A MOBILE LENS FOR PRODUCING DIGITAL HOLOGRAMS
摘要 The invention relates to lithography apparatus for producing digital holograms in a storage medium (4). Said apparatus comprises a light source (6, 10) for producing a writing beam (12) having a pre-determined beam width, a writing lens (14) for focussing the writing beam (12) on the storage medium (4) to be written, the writing lens (14) being arranged in a lens holder (16), and drive means for displacing the writing beam in a two-dimensional manner in relation to the storage medium. The aim of the invention is to solve the technical problem of writing computer-generated holograms quickly and simply, by means of optical lithography. To this end, a first drive device (18) is provided for displacing the lens holder (16) essentially perpendicularly in relation to the writing beam (12), and the aperture of the writing lens (14) is smaller than the width of the writing beam (12). The invention also relates to a method for lithographically producing a hologram in a storage medium.
申请公布号 WO02079881(A3) 申请公布日期 2003.10.16
申请号 WO2002EP03517 申请日期 2002.03.28
申请人 TESA SCRIBOS GMBH;NOEHTE, STEFFEN;DIETRICH, CHRISTOPH;THOMANN, ROBERT;STADLER, STEFAN;LEIBER, JOERN 发明人 NOEHTE, STEFFEN;DIETRICH, CHRISTOPH;THOMANN, ROBERT;STADLER, STEFAN;LEIBER, JOERN
分类号 G02B5/32;G03F7/20;G03H1/08;G11B7/0065;G11B7/09;G11B7/125;G11B7/135;H01L21/027 主分类号 G02B5/32
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