GRAVITY-FED IN-LINE CONTINUOUS PROCESSING SYSTEM AND METHOD

摘要

A gravity-few in-line continuous processing system (10) includes at least one processing chamber (12) disposed between a first load lock (14) and a second load lock (16). The second load lock is disposed lower than the first load lock. A first device (18) isolates the processing chamber from the first load lock. A second device (20) isolates the processing chamber from the second load lock. There is at least one track (22) through the processing chamber and the first and second load locks. The track is structured and arranged such that an article (24) slides thereon under the force of gravity. The apparatus also comprises an output tray (42), 4 device (20'), back of rotary barrel gate valves (60, 62, 64), 3 devices (18'). The track is disposed at an angle (26) to horizontal (19).