| 摘要 |
<p>Vertical heat treating equipment (1), comprising a rotating mechanism (15) for rotating a holder (13) having a large number of treated substrates (W) mounted thereon which is disposed on a liftable cover body (5) for opening and closing the throat (3) of a vertical heat treating furnace (2), the rotating mechanism (15) further comprising a rotating shaft (16) and a support part (19) for rotatably supporting the rotating shaft (16) through bearings (17) and a seal member (18), wherein the rotating shaft (16) is formed in a thin-walled hollow structure and so that cooling gas is allowed to flow on the inner and outer sides thereof, and a cooling passage (32) allowing refrigerant to flow therein formed so as to surround the upper side of the rotating shaft (16) is provided in the support part (19).</p> |
