摘要 |
<p>A method and an apparatus for detecting removable particulates initially on a test surface or surface to be inspected. The removable particles are transferred to a portion of a tacky surface (130)on a carrier by adhering and then removing the portion of the tacky surface (130)from the test surface. The carrier is received by a positioning means (131) and passed through the field of view of a surface inspection means (100)guided by a controller (170). Signals from the surface inspection means are combined with coordinates from the controller (170)to produce particle coordinates, which indicate particulates initally on the test surface. Particle coordinates on the tacky surface (130)measured before the tacky surface (130)is adhered and removed from the test surface can be compared with particle coordinates measured after the tacky surface (130)is adhered and removed from teh test surface. Several test surfaces can be sequentially inspected using the same carrier by storing particle coordinates after each measurements andcomparing the recent measurement with thecumulative previous measurements. The tacky surface (130)and the associated particle coordiantes can be conveyed to other analytical instuments for subsequent analysis.</p> |