发明名称 Laser plasma generation method and structure thereof
摘要 In laser-plasma generation, a fluid of target material is jet out to form a jet tube target <bold>21 </highlight>having a diameter phi and a wall thickness tau with a shell and a hollow space within the shell by using a core-column. A plurality of pulse-like laser beams <bold>30 </highlight>are directed to the jet tube target radially and equiangularly-spaced directions and are simultaneously focused and irradiated onto the jet tube target to generate the plasma.
申请公布号 US2003194055(A1) 申请公布日期 2003.10.16
申请号 US20030410269 申请日期 2003.04.10
申请人 MOCHIZUKI TAKAYASU 发明人 MOCHIZUKI TAKAYASU
分类号 G21K5/02;G21K5/08;H01L21/027;H05G2/00;H05H1/22;H05H1/24;(IPC1-7):H01S3/091;H05H1/00;G21G4/00;H01J35/00 主分类号 G21K5/02
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