| 摘要 |
<p>An exposure head and exposure apparatus for controlling pixel portions fewer than all the pixel portions arrayed on a substrate by a control signal generated according to exposure information with respect to a spatial modulating device. The controlled pixel portions become less because all the pixel portions arrayed on the substrate are not controlled, and therefore the transfer rate of the control signal is short. Thus, the modulation speed of a laser beam can be increased thereby to achieve high-speed exposure. As the laser device, a fiber-array light source including multiplexed laser light source where laser beams are multiplexed and inputted into optical fibers is used. As a result high luminance and high output are achieved. Especially it is effective in a semiconductor laser. The number of optical fibers arrayed can be small, resulting in low cost and small emission area when arrayed. The exposure apparatus can be variously applied to, for example, a laser lithograph a laser lithograph.</p> |
