发明名称 |
Optoelectronic device and method of manufacture thereof |
摘要 |
The present invention provides an optoelectronic device and a method of manufacture thereof. In one embodiment, the method of manufacturing the optoelectronic device may include creating a multilayered optical substrate and then forming a self aligned dual mask over the multilayered optical substrate. The method may further include etching the multilayered optical substrate through the self aligned dual mask to form a mesa structure.
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申请公布号 |
US2003194827(A1) |
申请公布日期 |
2003.10.16 |
申请号 |
US20020120923 |
申请日期 |
2002.04.11 |
申请人 |
AGERE SYSTEMS INC. |
发明人 |
LENTZ CHARLES W.;NECHAY BETTINA A.;OUGAZZADEN ABDALLAH;PARAYANTHAL PADMAN;PRZYBYLEK GEORGE J. |
分类号 |
H01L21/00;H01L29/225;H01L31/0312;H01L31/103;H01L31/105;H01L31/18;H01S5/20;H01S5/227;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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