| 摘要 |
<p>A method and apparatus are provided for peeling a thin film (90), typically 100 microns or less in thickness, from a liner (80) by use of a rotatable peel rod (50) supported in an air bearing. The air bearing comprises a support plate (40) having arcuate surfaces (41,42) which are substantially coaxial with a cylindrical film-bearing segment of the peel rod (50). Air openings in the arcuate surfaces conduct a flow of air into an air bearing gap (51,52) between (41,42) the arcuate surfaces and the peel rod (50).</p> |
