| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low thermal expansion material having high specific rigidity and sufficient strength to realize a precision mechanical member being lightweight and high in dimensional accuracy. <P>SOLUTION: The material is a ceramic sintered compact with low thermal expansion, which contains the phase of lithium aluminosilicate expressed by a(Li<SB>2</SB>O)-b(Al<SB>2</SB>O<SB>3</SB>)-c(SiO<SB>2</SB>) ((a) and (b) take each a value of 0.9-1.1, (c) takes a value of 1.8-2.2, and a+b+c=4) and simultaneously the phase of silicon nitride, and which has an absolute value of the thermal expansion coefficient of ≤5.0×10<SP>-7</SP>/K at 0-50°C, a Young's modulus of ≥180 GPa, a specific rigidity of ≥60 GPa/g/cm<SP>3</SP>, and flexural strength of ≥270 MPa. <P>COPYRIGHT: (C)2004,JPO |
