MULTILAYER FILM OPTICAL FILTER, METHOD AND DEVICE FOR DESIGNING FILM STRUCTURE OF THE SAME, AND PROGRAM FOR DESIGNING FILM STRUCTURE

摘要

PROBLEM TO BE SOLVED: To avoid mismatching of optical admittance and to significantly suppress production of ripples. SOLUTION: The multilayer film filter 1 has a symmetric structure of a plurality of cavities 4a1to 4akand coupling layers 3 arranged along the layer deposition direction. The number of alternated layers of L layers 7a1to 7akand H layers 7b1to 7bkin reflection multilayer films 6a1to 6akand 6b1to 6bkand the layer thickness of spacer layers 3a1to 3akin the respective cavities 4a1to 4akare designed according to the compared result of a specified refractive index of an optical substrate 2 and the optical admittance in a specified wavelength range for an equivalent film which is calculated from the plurality of cavities 4a1to 4akand coupling layers 3 having the symmetric structure in terms of a single equivalent layer. COPYRIGHT: (C)2004,JPO