| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for recognizing work altitude of a simple configuration which automatically, quickly, and accurately measures work altitude with an element carrier for resetting. SOLUTION: An element carrier is provided on the upper side of a handler body for vertical and horizontal movement, and comprises a plurality of pickers which, being movable vertically, sucks a semiconductor element to pick up and carry the semiconductor element between a tray and a change kit under a command from a control unit of the handler. It comprises a rising/falling block which is provided on one side of the element carrier for free vertical movement, a touch probe which is vertically provided on the rising/falling block and rises/falls by touching a lower object, a sensing means for sensing rising of the touch probe based on contact between the touch probe and the object, and a drive means which vertically drives the rising/falling block. COPYRIGHT: (C)2004,JPO
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