| 摘要 |
PROBLEM TO BE SOLVED: To provide a connecting sheet for a tester head used for conducting inspection without bringing a solder ball into direct contact with the tester head by being interposed between the solder ball and the tester head in the inspection of electric characteristics of a semiconductor product with solder ball with an existing inspection device. SOLUTION: This connecting sheet 6 for the tester head is arranged between the solder ball 5 of the semiconductor product and the tester head 1 of the inspection device, used for electric connection of them, and has a sheet base material 61 in which a plurality of conductive particles 5 coming into contact with the solder ball 2 are contained. COPYRIGHT: (C)2004,JPO
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