发明名称 APPARATUS AND METHOD FOR MEASUREMENT OF BIREFRINGENCE
摘要 PROBLEM TO BE SOLVED: To provide a birefringence measuring apparatus by which a birefringence amount with respect to an F<SB>2</SB>laser beam of a measuring object (e.g. fluorite) is measured in an environment close to an ordinary environment without using the F<SB>2</SB>laser beam. SOLUTION: The birefringence measuring apparatus to be provided comprises a birefringence measuring means used to measure a birefringence azimuth angle and the birefringence amount of the measuring object, with respect to first light and second light having mutually different wavelengths; and a computing means by which at least one from among the birefringence azimuth angle and the birefringence amount with respect to third light having a wavelength different from those of the first light and the second light is calculated, on the basis of information on the birefringence azimuth angle and the birefringence amount of the measuring object with respect to the first light and the second light obtained by the measuring means. COPYRIGHT: (C)2004,JPO
申请公布号 JP2003294611(A) 申请公布日期 2003.10.15
申请号 JP20020095782 申请日期 2002.03.29
申请人 CANON INC 发明人 YABU SHUICHI
分类号 G01N21/23;G01J4/00;G01M11/00;G03F7/20;(IPC1-7):G01N21/23 主分类号 G01N21/23
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