Electron microscope charge elimination method and electron microscope

摘要

Eliminating electricity of the specimen is performed by applying an acceleration voltage to an electron gun and applying primary electrons to a charged-up specimen from the electron gun. The maximum value of the acceleration voltages of the primary electrons applied in the past is adopted as electricity elimination start acceleration voltage. The acceleration voltage is gradually dropped from the electricity elimination start voltage so as to emit electrons charged on the specimen. The acceleration voltage is applied continuously until the specimen charged negatively becomes uncharged or is charged positively. A plurality of specimens are previously compared with respect to the acceleration voltage at which the secondary electron emission efficiency becomes 1 and electricity elimination termination voltage at which dropping the acceleration voltage is terminated is set to the minimum acceleration voltage or less. <IMAGE>