| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polarized light separating element comprised so that warp of a substrate by heat shrinkage of an organic double refraction film occurred during micro fabrication process on the organic double refraction film after bonding the organic double refraction film on the transparent substrate can be reduced. <P>SOLUTION: In order to separate two orthogonal polarized components, the organic double refraction film 3 with different refractive indices to a vibrating plane with different incident lights is bonded on the transparent substrate 1. A cyclic uneven grating (diffraction grating) 4 is formed in the organic double refraction film 3. A recessed part of the grating 4 is filled up with isotropic adhesive 5, and an opposite transparent substrate 6 is bonded on the grating. A coating film 7 with tensile stress is provided on the transparent substrate 1 bonding the organic double refraction film 3. The warp of the transparent substrate can be reduced by controlling the stress of the coating film 7 to be balanced with heat shrinkage stress of the organic double refraction film 3. <P>COPYRIGHT: (C)2004,JPO |
