| 摘要 |
PROBLEM TO BE SOLVED: To provide an aligner constituted so that a mask where a specified pattern is formed is attached to the photosensitive surface of a body to be exposed coated with a photosensitive agent in a close-contact state or a proximity state and the specified pattern is transferred to the body to be exposed by a light source, and improved so that unnecessary power consumption in the case of exposing the small-sized body to be exposed is restrained and unevenness in light quantity hardly occurs. SOLUTION: The aligner is constituted to turn on only a light source element included in an area within a surface light source which can be turned on/off for every light source element constituted of at least one light emitting element, which can completely expose the body to be exposed at the time of exposure and which is set so that a difference between the maximum value and the minimum value of the cumulative turning-on time of the light source element at the time of finishing the exposure becomes minimum at the time of exposure. COPYRIGHT: (C)2004,JPO
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