| 摘要 |
PROBLEM TO BE SOLVED: To increase the reliability of a turbo molecular pump by incorporating various types of sensor amplifiers in a pump body. SOLUTION: A temperature sensor 14 for temperature detection heated by a heater 13 and a temperature sensor amplifier 35 for amplifying detection signals from the temperature sensor 14 are incorporated in the pump body having electromagnets 5, 6, and 7 forming a magnetic bearing, position detection sensors 8, 9, and 10, and a motor 4. Thus, the effect of external noise in the measurement of temperature of the pump is reduced. COPYRIGHT: (C)2004,JPO
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