| 摘要 |
PROBLEM TO BE SOLVED: To realize a vertical moving shaft driver containing a balance device generating a counter propelling force balancing with a weight on the vertical moving shaft and accurately positioning and controlling the vertical moving shaft. SOLUTION: The vertical moving shaft driver 1 comprises a vertical moving shaft 20, a linear guide bearing 31 for supporting and guiding the vertical moving shaft 20 to a stator member 10, and a driver 40 for elevating and controlling the vertical moving shaft 20 to the stator member 10. It also comprises on the side surface of the vertical moving shaft 20, a balance device 50 consisting of at least a slope plane 51 slanting to vertical direction, and at least one hydrostatic bearing 52 for applying a specific propelling force to the slope plane facing to the slope plane. A bearing pad 53 of the hydrostatic bearing 52 is housed in a reciprocative manner into its housing member 54. At the same time, a component of force normal to a thrust with respect to the slope plane 51 of the hydrostatic bearing 52 is adjusted equal to the weight acted on the vertical moving shaft 20. COPYRIGHT: (C)2004,JPO
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