| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact rotation introducing machine provided with a feed screw mechanism for converting rotation into linear motion at high precision, and easily assemblable in a gas tight chamber. SOLUTION: This rotation introducing device is provided with: a cylindrical housing 4 with one opening end gas-tightly installed on an insertion hole 3 formed in a chamber wall 2a of the gas tight chamber 2; an output shaft 33 rotatably supported in the housing 4 on one end side, and penetrated through the through-hole 3 in the chamber wall 2a into the gas tight chamber 2 on the other side; and an input shaft 8 rotatably supported in the housing 4 on one end side, and protruded from the other opening end of the housing out of the gas tight chamber 2 on the other end side. It is also provided with: a coupling means 10 for transmitting torque while gas-tightly separating one end of the output shaft 33 and one end of the input shaft 8 facing each other in the housing 4 from each other; and the feed screw mechanism 37 comprising a feed nut 22 installed on a screw shaft part 35 integrally formed with the other end side of the output shaft 33. COPYRIGHT: (C)2004,JPO
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