发明名称 |
LASER REPETITION RATE MULTIPLIER |
摘要 |
Apparatus for producing high repetition rate optical pulses, including:a beam generator that produces an initial pulsed light beam having an initial pulse repetition rate;a pulse repetition rate multiplier, which receives the initial pulsed light beam and produces at least one pulsed light beam having a higher pulse repetition rate than the initial rate. |
申请公布号 |
EP1105950(B1) |
申请公布日期 |
2003.10.15 |
申请号 |
EP19980940523 |
申请日期 |
1998.08.20 |
申请人 |
ORBOTECH LTD. |
发明人 |
KATZIR, YIGAL;KLING, BORIS;FENSTER, PAUL |
分类号 |
G02B27/10;G03F7/20;H01L21/027;H01S3/00;H01S3/10;H05K3/00 |
主分类号 |
G02B27/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|