METHOD OF PRODUCING A MICRO-ELECTROMECHANICAL ELEMENT,申请号EP19990948889-传众专利搜索

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发明名称	METHOD OF PRODUCING A MICRO-ELECTROMECHANICAL ELEMENT
摘要
申请公布号	EP1144977(B1)	申请公布日期	2003.10.15
申请号	EP19990948889	申请日期	1999.09.29
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	NEUMEIER, KARL;BOLLMANN, DIETER
分类号	G01L9/00;G01L13/02;G01P15/08;(IPC1-7):G01L13/02;G01L9/06;G01L9/12	主分类号	G01L9/00
代理机构		代理人
主权项
地址

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