| 摘要 |
PROBLEM TO BE SOLVED: To make easily obtainable stable rotation of a polygon motor while restraining the fluctuation of the rotating speed of the polygon motor as far as possible in the case of controlling the rotating speed of the polygon motor to be at a target speed. SOLUTION: The rotating speeds of respective mirror surfaces which become laser radiation surfaces in the form of absorbing the length of the respective mirror surfaces of a polygon mirror 105 are individually set. For example, assuming that the lengths of the respective mirror surfaces are L1, L2, L3, L4, L5 and L6, the total of the lengths of the respective mirror surfaces is LA, and the target speed of one rotation of the polygon mirror is VT, the target speeds of the polygon motor to the respective mirror surfaces are set to (L1/LA)×VT, (L2/LA)×VT, (L3/LA)×VT, (L4/LA)×VT, (L5/LA)×VT and (L6/LA)×VT. COPYRIGHT: (C)2004,JPO |
