| 摘要 |
PROBLEM TO BE SOLVED: To provide a takeout apparatus of a glass substrate for reliably taking out glass substrates one by one without damaging them from the glass substrate where a number of substrates that are shipped from a manufacturing factory are laminated even if the glass substrate is large and thin. SOLUTION: The takeout apparatus for a glass substrate comprises a glass substrate-placing table 1 where the glass substrate G in which a number of substrates are laminated is placed, a glass substrate-placing table-tilting mechanism 2 for tilting the glass substrate-placing table 1 from a nearly horizontal state to a specific angle, a glass substrate-retaining member 4 having a glass end section-sucking mechanism 3 for sucking the upper end side surface on the glass substrate located on the surface at the tip section in the glass substrate G where a number of substrates that are placed on the glass substrate-placing table 1 while being tilted are laminated, a glass substrate retaining member- tilting mechanism 5 for tilting the glass substrate-retaining member 4 from the suction position of the glass substrate to the nearly horizontal state, and a glass substrate-accepting mechanism 6 for accepting the glass substrate from the glass substrate-retaining member 5 that is tilted to the nearly horizontal state. COPYRIGHT: (C)2004,JPO
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