MICROLENS SUBSTRATE AND METHOD FOR MAKING THE SAME, AND PROJECTION LIQUID CRYSTAL DISPLAY DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To simplify optical axis alignment and manufacturing process steps by performing patterning of the lens shape of a second microlens array by utilizing a first microlens array.

SOLUTION: The patterning of the lens shape of the second microlens array is performed by irradiating the first microlens array with UV parallel light beams. The UV parallel light beams are condensed by the respective lenses of the first microlens array and expose the resist layers applied on the focal planes of the lenses. The points to be exposed can be changed by changing the incident angles of the UV parallel light beams and the resist patterns of the desired shapes can be obtained by controlling the incident angles of the UV parallel light beams and the exposure time. The shapes of the resist patterns are thereafter transferred to intermediate glass layers and the recessed parts are filled with a UV curing resin of a high refractive index by performing etching.

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