| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method capable of suppressing dispersion of the inner pressure of a detection chamber, and thereby reducing dispersion of an output signal, concerning a pressure sensor having the detection chamber formed by enclosing oil as a pressure transfer medium by a diaphragm. SOLUTION: A connector case 3 is prepared, wherein a recessed part 30 is formed on one end side and a sensor element 1 is provided in the recessed part 30. On the other hand, after fixing the deformable diaphragm 8 on one end side of a housing 7 by pressure application, the deflection quantity of the diaphragm 8 is measured, and the capacity of the detection chamber is calculated based on the deflection quantity. After injecting the oil 11 of the quantity corresponding to the calculated capacity of the detection chamber into the recessed part 30, one end side of the connector case 3 is jointed to one end side of the housing 7, to thereby form the detection chamber for pressure detection blocked by the recessed part 30 and the diaphragm 8 and having the oil 11 enclosed therein. COPYRIGHT: (C)2004,JPO
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