| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a periodicity pattern-inspecting apparatus and a periodicity pattern-inspecting method for accurately measuring an opening area even if the luminance distribution of a light source and the sensitivity distribution of a camera exist in an imaging system. <P>SOLUTION: In the imaging image of the periodicity pattern, a threshold (n) is determined based on the maximum pixel value (n) in a region (n) of periods (n=1,2, and the like), and the region (n) is binarized with the threshold (n) to obtain an area (n) in the periodicity pattern-inspecting apparatus and method. <P>COPYRIGHT: (C)2004,JPO |
