| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature control apparatus for a liquid crystal display bonding chamber of a manufacturing device. SOLUTION: This temperature control apparatus is characterized in that it is provided with a bonding chamber bonding a first substrate and a second substrate applied with a sealing compound, an upper stage and a lower stage disposed in the upper and lower sides of the bonding device chamber, a vent pipe for introducing air or gas into the bonding chamber after the bonding chamber is under vacuum, and a heating means for heating the air or gas introduced through the vent pipe. COPYRIGHT: (C)2004,JPO
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