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经营范围
发明名称
Cathodic sputtering device
摘要
申请公布号
EP0812001(B1)
申请公布日期
2003.10.15
申请号
EP19970106083
申请日期
1997.04.14
申请人
SINGULUS TECHNOLOGIES AG
发明人
SICHMANN, EGGO
分类号
H01J37/34;(IPC1-7):H01J37/34;C23C14/34;C23C14/35;C23C14/00
主分类号
H01J37/34
代理机构
代理人
主权项
地址
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