发明名称 |
Method for producing hydrophobic silica fine powder |
摘要 |
<p>Hydrophobic silica fine powder is produced by pyrolyzing a silane compound to form a silica fine powder and hydrophobizing the silica fine powder with an organohalosilane as hydrophobizing agent in a fluidization vessel. A portion of the silica fine powder is bypassed to a waste gas line from the fluidization vessel and collected with a cyclone and bag filter, and the collected powder is fed to the fluidization vessel where it is hydrophobized. The amount of unreacted organohalosilane in the waste gases is reduced, alleviating the burden on waste gas treatment. The silica having the unreacted organohalosilane borne thereon is fed back to the fluidization vessel, increasing the reaction efficiency of organohalosilane. <IMAGE></p> |
申请公布号 |
EP1184425(B1) |
申请公布日期 |
2003.10.15 |
申请号 |
EP20010307404 |
申请日期 |
2001.08.31 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
NOZAWA, YASUAKI;SHIRASUNA, KIYOSHI;UEHARA, HIDEKAZU;SHIBATA, KEIJI;UENO, SUSUMU |
分类号 |
G01N21/956;C01B33/18;C08K9/06;C09C1/30;C09C3/12;C30B29/06;G01N21/95;H01L21/02;H01L21/304;H01L21/66;(IPC1-7):C09C1/30 |
主分类号 |
G01N21/956 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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