| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to arbitrarily designate the visual field for X-ray observation just as in the case of a conventional optical microscope, because a sample can be moved only in the direction perpendicular to an X-ray transmission window when a PMMA film on which the sample is put is fitted to the X-ray transmission window, and the sample can be exposed to X rays only when it happens to be moved into the X-ray transmission window in a current device. SOLUTION: The visual field can be selected by mounting the X-ray transmission window on the side of a vacuum chamber for generating laser plasma beforehand, to structurally separate the vacuum chamber and the PMMA film on which the sample is put and secure the degree of freedom in the relative movement of positions. COPYRIGHT: (C)2004,JPO |
