MAGNETOMETRIC SENSOR AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To suppress a change in a detection sensitivity due to a positional relationship between a magnetism convergence plate and a magnetism sensing part regarding a magnetometric sensor, and to provide a method of manufacturing the magnetometric sensor. SOLUTION: A guiding magnetism convergence plate 3 is formed so as to be overlapped with the magnetism sensing part 10 on a semiconductor substrate 5 in which a magnetism detecting element 1 is formed on its surface. A layer by an adhesive 7 is laminated on the semiconductor substrate 5 on which the plate 3 is formed. A main magnetism convergence plate 2 is laminated on the layer by the adhesive 7 in such a way that the part 10 is overlapped with a prescribed part as viewed from its lamination direction. COPYRIGHT: (C)2004,JPO