| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film gas sensor preventing lowering of an electric resistance between pads without activating an electrical conduction path other than a gas sensing film even under a high humidity environment. SOLUTION: The thin film gas sensor comprises an Si substrate 1 with a penetration hole, a diaphragm composed of at least a first insulation film 2 spread over the opening of this penetration hole, a thin film heater 3 on this diaphragm, a second insulation film 4 covering the thin film heater 3, and the gas sensing film 6 composed of SnO<SB>2</SB>with sensing film electrodes 5 at both ends thereof. This sensing film electrode 5 is composed of a part connecting with the layered gas sensing film, a pad 5p for wire bonding, and a lead 51 connecting both of them. In the thin film gas sensor, the lead is covered with an electrical insulation film. COPYRIGHT: (C)2004,JPO
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