| 摘要 |
PROBLEM TO BE SOLVED: To provide a particle foreign object inspecting method and a particle foreign object inspecting apparatus that do not detect a lacked part as a foreign object, even if each particle in a particle is dispersed and the lacked part is generated in a particle layer, can accurately detect the foreign object, and has a color quality inspection. SOLUTION: One part of the particle is arranged at the rear side of a transparent member, only one part of the particle can be virtually recognized across the transparent member in a region where one part of the particle is arranged, the particle is allowed to exist on the surface of the transparent member, the particle is imaged, and an obtained image is processed for detecting a foreign object in the particle in the method for inspecting the particle foreign object. In the particle foreign object inspecting apparatus, a catch pan for accommodating one part of the particle is arranged at the rear side of the transparent member. COPYRIGHT: (C)2004,JPO
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