| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum ultraviolet light irradiation device capable of controlling surely the intensity of vacuum ultraviolet light from a xenon lamp. SOLUTION: This vacuum ultraviolet light irradiation device is equipped with the xenon lamp for radiating the vacuum ultraviolet light. The device is characterized by being equipped with a light measuring means for measuring the intensity of light to be measured, an operation means for determining the intensity of the vacuum ultraviolet light, and a control means for controlling the intensity of the vacuum ultraviolet light. In this case, the xenon lamp is preferably lit by an input power having a lamp power density of 2.8 W/cm<SP>3</SP>or higher. The light measuring means preferably has a semiconductor light- receiving element comprising a gallium-phosphorus photodiode or a silicon photodiode, and besides the light measuring means is preferably equipped with a band-pass filter for interrupting light having the wavelength over 400 nm. COPYRIGHT: (C)2004,JPO
|
