| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow control valve which accurately regulates a flow rate. SOLUTION: In this flow control valve, an orifice 54 is arranged as a throttling means throttling fluid flowing from a second chamber 24, and a branch part 57 is arranged on the downstream side of the orifice 54 for branching a part of the fluid. A part of the fluid branched in the branch part 57 is introduced to the back face side of a pressure regulation film 27, and a primary side switch valve 53 opening/closing a fluid flow passage is arranged on the upstream side beyond the orifice 54. COPYRIGHT: (C)2004,JPO
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