发明名称 |
(METH)ACRYLATE ESTERS, STARTING ALCOHOLS FOR THE PREPARATION THEREOF, PROCESSES FOR PREPARING BOTH, POLYMERS OF THE ESTERS, CHEMICALLY AMPLIFIABLE RESIST COMPOSITIONS, AND METHOD FOR FORMING PATTERNS |
摘要 |
<p>The (meth)acrylate of the present invention is represented by the following formula (1). The (meth)acrylate can be produced by first producing a lactone by reducing an addition product obtained by the Diels-Alder reaction between 1,3-diene and maleic anhydride, and then hydrating the lactone to produce an alcohol followed by (meth)acrylation of the alcohol. A polymer produced by (co)polymerizing a monomer composition comprising the (meth)acrylate of the present invention is excellent in transparency, dry etching resistance, and solubility in organic solvents, and so it is preferably used as a resin for a chemically amplified resist composition. <CHEM> wherein each of R<1>, R<2>, R<3> and R<4> represents a hydrogen atom, a methyl group or an ethyl group; either one of x<1> or x<2> represents a (meth)acryloyloxy group and the other represents a hydrogen atom; both A<1> and A<2> represent hydrogen atoms, or A<1> and A<2> form -O-, -CH2- or -CH2CH2-.</p> |
申请公布号 |
EP1352904(A1) |
申请公布日期 |
2003.10.15 |
申请号 |
EP20010999568 |
申请日期 |
2001.12.05 |
申请人 |
MITSUBISHI RAYON CO., LTD. |
发明人 |
KAMON, YOSHIHIRO;FUJIWARA, TADAYUKI;KUWANO, HIDEAKI;MOMOSE, HIKARU;KOIZUMI, ATSUSHI |
分类号 |
C07D307/88;C07D307/93;C07D493/18;C08F220/18;C08F220/28;G03F7/039;(IPC1-7):C07D307/93;C07D307/33;C07D307/77;C07D307/04 |
主分类号 |
C07D307/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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