| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece delivery device improving the efficiency of production and saving air-conditioning expenses by moving workpiece storing cassettes in a short time. SOLUTION: The workpiece delivery device for delivering the workpieces such as glass substrates to a processing device comprises a stacker crane 1 for carrying the workpiece storing cassettes, placement shelves 3 for the workpiece storing cassettes, workpiece delivery parts 4, a workpiece transfer mechanism for delivering the workpieces between the workpiece delivery part 4 and the processing device, and moving wheels 8. Clean air passing through a paper filter 6 is distributed into the workpiece delivery device, and a stacker crane part A1 in which the stacker crane 1 is arranged, a cassette part A2 in which the placement shelves 3 for the workpiece storing cassettes and the workpiece delivery parts 4 are arranged, and a transfer mechanism part A3 in which the workpiece transfer mechanism 5 is arranged are independently unitized in two selective parts adjacent to each other and separabble with each other. COPYRIGHT: (C)2004,JPO |
