| 摘要 |
Process and apparatus for obtaining an excimer and application to a laser. The apparatus comprises a compression chamber (9), compressor (11) for compressing the gaseous mixture R+XY+M in the compression chamber (9), an expansion chamber (3) communicating at least one opening (23,23a) with the compression chamber (9), a vacuum pump (25) for producing within the expansion chamber (3) a pressure well below that prevailing in the compression chamber (9), the pressure difference between the compression and expansion chambers, the surface of the opening and the volume of the compression chamber being such that the gaeous mixture entering the compression chamber undergoes a supersonic adiabatic expansion with a Mach number at least equal to 10 and electrodes (27, 29, 27a, 29a) for producing an electric discharge (E) in the expansion chamber (3), downstream (x) of the opening (23, 23a) FIG. 2. |
