Water content-measurement method and water content-measurement apparatus, and electrical component-fabrication method using the measurement apparatus and method

摘要

A measurement method and apparatus, which are capable of simply measuring the water content of an object with a high degree of accuracy, is characterized by irradiating the surface of the object with at least two monochromatic light beams having different wave length values, one of the wave length values being less than 1350 nm; measuring the intensity of light for each of the light beams reflected from the surface of the object using a light intensity-measurement unit; obtaining the reflective absorbance (Alambda) of each light beam; calculating a reflective-absorbance differences (DeltaAlambda) between, or a reflective-absorbance ratio (Alambda') of, the respective light beams, respectively; and estimating the water content of the measured object by using the relationship between water content and the reflective-absorbance differences or reflective-absorbance ratio, which relationship stored in a memory device in advance.