,申请号JP20010575254-传众专利搜索

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发明名称
摘要
申请公布号	JP2003530706(A)	申请公布日期	2003.10.14
申请号	JP20010575254	申请日期	2001.03.29
申请人		发明人
分类号	C23C16/44;H01L21/205;(IPC1-7):H01L21/205	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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