| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus which deflects a laser beam by using galvano-mirrors, machines a workpiece by using the deflected laser beam condensed by a fθlens, and can avoid deterioration of machining position accuracy caused by the temperature change of the galvano-mirrors or a galvanometer scanner. <P>SOLUTION: The laser beam machining apparatus which deflects the laser beam by using galvano-mirrors 3a and 3b, and carries out machining by using the deflected laser beam condensed by the fθlens 5 includes a galvanometer temperature detecting means 12 to detect the temperature of the galvano-mirror, a lens temperature detecting means 11 to detect the temperature of the fθlens, and a means to control the active position of the deflection displacement of the galvano-mirror on the basis of the temperature obtained from the galvanometer temperature detecting means and the lens temperature detecting means. <P>COPYRIGHT: (C)2004,JPO</p> |
