| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method capable of forming holes of a large taper rate. <P>SOLUTION: The laser beam condensed by an objective lens is made incident on the surface of a metallic layer of an object for working formed by firmly sticking a metallic layer on the surface of a substrate member consisting of a first material to form the hole on the metallic layer and to expose a part of the substrate member. The beam diameter of the laser beam on the surface on the incident side of the objective lens is diminished. The laser beam diminished in the beam diameter is condensed by the objective lens and the condensed laser beam is made incident on the base surface of the hole formed on the metallic layer of the object for working and the peripheral part of the hole, by which the hole is formed at the substrate member exposed on the base surface of the hole formed at the metallic layer. <P>COPYRIGHT: (C)2004,JPO</p> |
