| 摘要 |
PROBLEM TO BE SOLVED: To secure high productivity with high accuracy and safety by bringing the beam operation of the beam moving mechanism of a transfer apparatus infinitely close to an ideal curve, thereby reducing time lag due to the delay of the beam operation and the deviation of a reaching point. SOLUTION: The control circuit 40 of the transfer apparatus sends a pulse signal to a servo drive part 45, moves sliders 13 and 23 and controls beams 3 and 3 by using the moving mechanisms 1 and 2 to carry out the operations of the opening and closing, the vertical movement and the movement. The ideal curve of the displacement position of the beam is determined in the control circuit 40, and an operating curve is brought infinitely close to the ideal curve by further correcting the advancing angle of the change curve of a difference between the operating curve brought close to the ideal curve by correcting the advancing angle for closing the ideal curve. COPYRIGHT: (C)2004,JPO
|
