| 摘要 |
A part mounting apparatus mounts a part, such as a film electronic part, accurately and efficiently on a substrate, such as a glass substrate. A measuring device (<HIL><PDAT>21</BOLD><PDAT>) moves along the edges of a glass substrate (<HIL><PDAT>31</BOLD><PDAT>) and measures the distance between the measuring device (<HIL><PDAT>21</BOLD><PDAT>) and the glass substrate (<HIL><PDAT>31</BOLD><PDAT>) at predetermined positions. The measuring device (<HIL><PDAT>21</BOLD><PDAT>) gives measured data to a controller (<HIL><PDAT>22</BOLD><PDAT>). The controller (<HIL><PDAT>22</BOLD><PDAT>) determines the state of deformation of the glass substrate (<HIL><PDAT>31</BOLD><PDAT>) on the basis of the measured data and controls suctions to be applied by suction pads (<HIL><PDAT>12</BOLD><PDAT>) included in a substrate conveying unit (<HIL><PDAT>10</BOLD><PDAT>) to the glass substrate (<HIL><PDAT>31</BOLD><PDAT>) on the basis of the measured data. The glass substrate (<HIL><PDAT>31</BOLD><PDAT>) being conveyed by the substrate conveying unit (<HIL><PDAT>10</BOLD><PDAT>) receives downward suctions of the suction pads (<HIL><PDAT>12</BOLD><PDAT>) and upward reaction forces of props (<HIL><PDAT>13</BOLD><PDAT>). The surface of the glass substrate (<HIL><PDAT>31</BOLD><PDAT>) can be brought to a level by thus correcting local warps in the glass substrate (<HIL><PDAT>31</BOLD><PDAT>) and the glass substrate (<HIL><PDAT>31</BOLD><PDAT>) can be held at a level corresponding to that of the upper ends of the props (<HIL><PDAT>13</BOLD><PDAT>).</PTEXT>
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