发明名称 MICROSTRUCTURE FABRICATING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a microstructure fabricating method capable of forming a structure consisting of minute, nm-order heights or lines on the surface of any work without contaminating its material using a device similar to an STM. SOLUTION: The method to fabricate a microstructure on the work 1 using the device similar to the STM works through such procedures that a probe 2 is moved to the desired position on the surface of the work 1 and located, the desired position of the work 1 is heated locally by the current fed from the probe 2 while such a spacing is kept always that the probe 2 and the work 1 will never touch, and the molten work 1 is coagulated by the use of the surface tension, and thereby the intended microstructure consisting of heights or lines is accomplished. COPYRIGHT: (C)2004,JPO
申请公布号 JP2003291100(A) 申请公布日期 2003.10.14
申请号 JP20020096749 申请日期 2002.03.29
申请人 FUJITSU LTD 发明人 ANAZAWA TOSHIHISA;YAMAGUCHI HIDESHI;KATAOKA YUJI
分类号 B82B3/00;H01J37/30;(IPC1-7):B82B3/00 主分类号 B82B3/00
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