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发明名称
FORMATION OF FILM IN ATMOSPHERIC PRESSURE CVD SYSTEM
摘要
申请公布号
JPH01220430(A)
申请公布日期
1989.09.04
申请号
JP19880043312
申请日期
1988.02.27
申请人
OKI ELECTRIC IND CO LTD
发明人
TAKAHASHI HIROAKI
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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