发明名称 Ion gun deposition and alignment for liquid-crystal applications
摘要 The present invention includes a method of forming an aligned film on a substrate. The film is deposited and aligned in a single step by a method comprising the step of bombarding a substrate with an ion beam at a designated incident angle to simultaneously (a) deposit the film onto the substrate and (b) arrange an atomic structure of the film in at least one predetermined aligned direction.</PTEXT>
申请公布号 US6632483(B1) 申请公布日期 2003.10.14
申请号 US20000608798 申请日期 2000.06.30
申请人 发明人
分类号 C23C14/06;C23C14/22;C23C14/34;G02F1/1337;(IPC1-7):C23C14/48;C23C14/24;C23C16/26;B05D5/00 主分类号 C23C14/06
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