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发明名称
摘要
申请公布号
JP3456242(B2)
申请公布日期
2003.10.14
申请号
JP19930322720
申请日期
1993.12.21
申请人
发明人
分类号
H01L21/336;H01L21/822;H01L21/8234;H01L21/8238;H01L27/02;H01L27/04;H01L27/088;H01L27/092;H01L29/06;H01L29/78;(IPC1-7):H01L21/336;H01L21/823
主分类号
H01L21/336
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代理人
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地址
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