| 摘要 |
<p>1362803 Coating; coating apparatus COMMISSARIAT A L'ENERGIE ATOMIQUE 18 Oct 1971 [23 Oct 1970] 48384/71 Headings B2E and B2L [Also in Divisions Cl and C7] Thin films of a metal or metal compound are deposited on a heated substrate from a mist of a solution which forms the material to be deposited, the mist being transported towards the substrate by a carrier gas, and the solution being atomised by ultrasonic waves. The atomised solution may be fed from the aerosol generator into a deposition chamber containing a stationary or moving substrate, using a rotating or reciprocting nozzle. The gas may be inert, e.g. Ar, or may be oxidising if oxide films are to be produced. Further gas may be introduced between the generator and the deposition chamber. The film may be of Fe 2 O 3 (formed from aqueous FeCl 3 solutions or organic solution of organic ferric salts), garnets, sulphides, Al, Ni, Cr, Co, Pt, Pd, Os or Ir.</p> |
