| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gas treatment apparatus not having fear corroding the constituent parts of the apparatus, for example, a vacuum pump and a decompression tank even if a gas to be treated is corrosive, and a gas treatment method using the same. <P>SOLUTION: The gas treatment apparatus is equipped with an adsorption column 1 packed with zeolite for adsorbing NOx, a gas inlet part A for introducing the gas to be treated into the adsorption column 1, a gas outlet part B for discharging the gas treated in the adsorption column 1, a heater for heating zeolite, the temperature controllable decompression tank 6 connected to the adsorption column 1, the vacuum pump 7 connected to the decompression tank 6 and a decomposition device 9 connected to the exhaust port of the decompression tank 6. When the adsorption capacity of zeolite lowers, the heater and the vacuum pump 7 are operated to heat zeolite under vacuum to perform the desorption and regeneration treatment of zeolite. The desorbed gas is diffused into the decompression tank 6 and the gas in the decompression tank 6 is held to a predetermined temperature. Thereafter, the gas is sucked by the vacuum pump 7 to be introduced into the decomposition device 9 from the exhaust port of the vacuum pump 7. <P>COPYRIGHT: (C)2004,JPO</p> |
